http://www.ivypub.org/journal/RSS.aspx?J=SJIE&lang=cnen-US2020-9<p class="abstract">Application of Novel MEMS sensor in Airborne COVID-19 Virus Detection</p><ul><li>Pages 1-5</li><li>Author Fang DuFuchang Zhan</li><li>Abstract In recent years, the technology of microelectronic mechanical system (MEMS) has rapidly developed, and the integrated research of micro-sensor, micro-actuators and micro-systems has received widespread attention. MEMS technology can be used in many areas, such as biomedical science, environmental monitoring, and industrial production. And among them, the application in biomedicine has developed rapidly as of late. Concurrently, the emergence of the novel coronavirus poses a serious threat to both mankind’s mortality and the social economy. Hence, given that its characteristics provide the possibility of virus detection, we have designed a MEMS sensor in cooperation with the hospital to detect viruses and explore the sensitivity of the sensor. After experiment, the sensor can sensitively detect the viruses.</li></ul>/SJIE/paperinfo/55523.shtmlScientific Journal of Information Engineering/SJIE/paperinfo/55523.shtml