Paper Infomation
Research on High-Gain and High-Bandwidth Transimpedance Amplification Circuit for Electron Detection
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Author: Ziming Dong
Abstract: As a preamplifier, the transimpedance amplification circuit is widely used in optical communication, infrared measurement, semiconductor measurement equipment and other fields. However, the contradiction between its gain, bandwidth and other dynamic reliability has always been a problem for its high-speed application. Throughput has always been one of the major bottlenecks plaguing SEM systems, and high-speed electron detection pre-amplification circuits are essential to obtain high-throughput scanning electron microscope systems. In this paper, the dynamic stability of the high-speed transimpedance amplification circuit is simulated and analyzed by using professional simulation software. The influence of Miller compensation capacitance and the equivalent input capacitance of the electronic detector on the dynamic characteristics of the system is illustrated. Finally, a highly stable transimpedance amplification circuit with a gain of up to 20kΩ and a bandwidth of more than 12MHz is designed.
Keywords: Electron Detector, Transimpedance Amplification Circuit, High Gain, High Bandwidth, Equivalent Input Capacitance
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